Process for testing the functionality of a sensor comprises switching an impurity parameter onto the sensor, measuring the change of the sensor signal, and using the change in signal as a measure for the change of sensor dimensions专利查询检索|Process for testing the functionality of a sensor comprises switching an impurity parameter onto the sensor, measuring the change of the sensor signal, and using the change in signal as a measure for the change of sensor dimensions专利申请-路标网

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Process for testing the functionality of a sensor comprises switching an impurity parameter onto the sensor, measuring the change of the sensor signal, and using the change in signal as a measure for the change of sensor dimensions

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